Uwe Schwarz obtained a degree in Physics at the University in Leipzig in 1988. He joined X-FAB in 1992. He worked first as a development and process engineer on photolithographic processing and was involved in CMOS technology development programs of the company. In 1997 he started the first activities in the field of MEMS process development. He has been deeply involved in the development of the MEMS foundry business at X-FAB. The development of Silicon wafer based processes for high volume production of pressure sensors and the realization of sensors with tight specifications and improved performances are in the focus of his current activities.