Xavier Rottenberg, scientific director and group leader wave-based sensors and actuators – IMEC | TOPIC: Human-centric Microsystems
With more than 20 years’ experience, imec has been at the forefront of advanced MEMS technologies. This presentation will review the latest results obtained at imec in the field of human-centric microsystems, from sensors to actuators with specific focus on wave-based acoustic and optical microsystems. These acoustic and optical microsystems allow to revise typical MEMS approaches. The audience will hear about applications ranging from mid-air haptic feedback over LiDAR to bio-medical sensing.