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Dr Philippe Robert, Head of the Microsystems Section – LETI | Topic: Recent Achievements and New Technologies for High Performance MEMS

18 Mar 2019
14:15 – 14:30

Dr Philippe Robert, Head of the Microsystems Section – LETI | Topic: Recent Achievements and New Technologies for High Performance MEMS

This presentation will give a short overview of LETI’s MEMS activities with a focus on two recent developments to meet the new markets trends:

–  Ultra-miniaturized high performance inertial sensors solution for ADAS technology, based on an innovative silicon nano-wire detection

–  High efficiency haptics devices for smartphone and tablets based on piezoelectric thin film integration on glass substrate