Mr Uwe Schwarz, Team Leader MEMS-Sensors Process Development – X-FAB | Topic: High Volume MEMS Production Using a Pure Play MEMS Foundry
MEMS devices made by Silicon became more and more important within the last two decades. Original drives of the MEMS market like automotive applications are substituted meanwhile by new consumer and health care applications. The need of MEMS devices is permanently increasing. In the last years were several MEMS foundries founded and they offers MEMS production capabilities. This is a similar situation as it is established since many years in the standard IC industry. In opposite to the semiconductor industry is the level of standardization in the MEMS community still on a very low level. In this paper it will be described how it will be possible to overcome this situation by the development of open platform technologies for MEMS processes.