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Mr Rakesh Kumar, Senior Director MEMS Technology Development – Global Foundries | Topic: Process Design Kit for MEMS Device Fabrication-Challenges and Opportunities

18 Mar 2019
12:05 – 12:20

Mr Rakesh Kumar, Senior Director MEMS Technology Development – Global Foundries | Topic: Process Design Kit for MEMS Device Fabrication-Challenges and Opportunities

There is increasing trend towards standardization of MEMS manufacturing process to shorten development cycle time for emerging MEMS sensors. A MEMS foundry can greatly help in standardization by offering a platform process technology supported by Process Design Kit (PDK) to a fabless or fab-lite company for the design of MEMS devices compatible with foundry process.

Currently very few MEMS foundries offer platform process technologies and corresponding PDKs for MEMS fabrication. The reason is single product, single design and single package paradigm prevalent in the industry for the diverse set of MEMS products. It requires well characterized process modules, process flows and reference designs to develop a MEMS PDK. The talk will cover the challenging associated with PDK development for MEMS due to diversity of products and associated processes. It will be shown, how a foundry can mitigate these challenges by developing processes and PDK to realize a specific process platform. This process platform can address a family of MEMS products with similar process technologies using a commonality of process modules and integration schemes. This will increase the chances of first time success, reduce development costs and time, and encourage designers to come out with innovative and novel designs for emerging MEMS applications.