Dr Yiyang Chen, Director MEMS Process – Senodia | Topic: One Principle, Multiple Sensors ~ SAW
With the rapid development of the IoT technology, sensors are playing important roles in intelligent industry, automatic drive, etc. Senodia has been devoted to developing silicon-based MEMS sensors for more than 10 years and tried to explore new sensing technologies. Development of SAW (surface acoustic wave) based sensors is one of the most important areas. SAW devices offer promising applications as sensors because they transduce an electrical input into a mechanical wave which can easily interact with outside physical surroundings. The passive and wireless features make them remotely operable without a battery, which is attractive for IoT applications. Senodia has successfully fabricated some SAW sensor prototypes, the high sensitivity and fast response speed are impressive. We have also tried to adopt unique materials for harsh operating conditions such as high temperatures up to 1000K, or high levels of shock and vibration, under which silicon-based sensors will not work properly.