Andrea Urban – BOSCH | TOPIC: MEMS at Bosch – Products and Process Technology Demands
MEMS at Bosch look back on more than 25 years of development and production. MEMS sensors and actuators required the development of new and application specific manufacturing technologies besides typical semiconductor processes. Silicon Deep Reactive Ion Etching, also known as the „Bosch Process“, is one of these worldwide established MEMS key manufacturing processes on the market. It was an enabler for a huge variety of MEMS low-cost mass products like microphones, micro mirrors, pressure and inertial sensors for automotive, consumer and IoT applications, which nowadays penetrate and support the daily life of all of us.