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Mr Arjun Kumar Kantimahanti, SVP MEMS and Sensors BU, Technology Development, Design Technology – Silterra Topic: Monolithic Integration of Piezoelectric MEMS on CMOS Wafers

18 Mar 2019
14:45 – 15:00

Mr Arjun Kumar Kantimahanti, SVP MEMS and Sensors BU, Technology Development, Design Technology – Silterra Topic: Monolithic Integration of Piezoelectric MEMS on CMOS Wafers

In this talk, we present the outline of Silterra’s patented “Piezoelectric MEMS on CMOS” process. 

This process allows the true monolithic integration of Piezoelectric MEMS (SAW, BAW and PMUT) with any of the CMOS technologies thus resulting in a single chip solution. 

Designers can choose any of the SilTerra’s traditional CMOS/BCD/RF/Ultra low power platforms (180nm or 130nm) and build the Piezoelectric MEMS devices on the top of these platforms.