Dr. Matthias Schulze – Fraunhofer Institute for Photonic Microsystems
Matthias Schulze studied physics at the Technical Universities Dresden and Magdeburg and received his diploma in 1996. He got his PhD in 2001 with a work on pulsed magnetron sputtering at the Fraunhofer Institute for Electron Beam and Plasma Technology (FEP). After working several years in the industry as an R&D manager (Von Ardenne, Applied Films, Applied Materials) he joined Fraunhofer in 2007 and managed a group for Surface Micromachining at the Fraunhofer Institute for Photonic Microsystems (IPMS), successful executing numerous of industrial projects with the focus on complex optical actuators (spatial light modulators, micro-bolometers) using monolithic integration of MEMS-on-CMOS combined with sacrificial layer technologies. In March 2016 Matthias was promoted to Head of Department Engineering at IPMS. He is now supervising a team of about 40 engineers, physicists and chemists responsible for process development and integration in our 200mm CMOS compatible MEMS cleanroom.