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Dr. Matthias Schulze – Fraunhofer Institute for Photonic Microsystems

Head of Department Engineering

Dr. Matthias Schulze – Fraunhofer Institute for Photonic Microsystems

Head of Department Engineering

Biography

Matthias Schulze studied physics at the Technical Universities Dresden and Magdeburg and received his diploma in 1996. He got his PhD  in 2001 with a work on pulsed magnetron sputtering at the Fraunhofer Institute for Electron Beam and Plasma Technology (FEP). After working several years in the industry as an R&D manager (Von Ardenne, Applied Films, Applied Materials) he joined Fraunhofer in 2007 and managed a group for Surface Micromachining at the Fraunhofer Institute for Photonic Microsystems (IPMS), successful executing numerous of industrial projects with the focus on complex optical actuators (spatial light modulators, micro-bolometers) using monolithic integration of MEMS-on-CMOS combined with sacrificial layer technologies. In March 2016 Matthias was promoted to Head of Department Engineering at IPMS. He is now supervising a team of about 40 engineers, physicists and chemists responsible for process development and integration in our 200mm CMOS compatible MEMS cleanroom.

 

All session by Dr. Matthias Schulze – Fraunhofer Institute for Photonic Microsystems